About this item
E 99 Series
- E 99 series storage boxes are the industry standard, offering maximum stacking density for space limited stockers and work in process racks
- Automation compatible
- Flat bottom, stackable
- Single carrier capacity
- Accommodates select 25-capacity wafer carriers, excluding wide-flange carriers
- Migration path compatible with STAT-PRO® 100 material E 99 series storage boxes
- Overall dimensions: 285×272×241 mm
E 210 Series
E 210 series storage boxes provide automation compatibility with wide-flange carriers and allow convenient manual handling. They incorporate features to minimize particle generation due to wafer chatter and carrier movement.
Automation compatible
Seven degree wafer tilt minimizes wafer chatter
Balanced for easy manual handling, stackable
Track notch registration
Single carrier capacity
Accommodates all 25 and 26 capacity wafer carriers and wide outboard flange carriers
Overall dimensions: 302×272×292 mm
HA 200 Series
HA 200 series storage boxes are the highest performance 200 mm storage boxes, providing superior automated and manual handling. They also incorporate features to minimize particle generation due to wafer chatter and carrier movement.
Automation compatible
Five degree wafer tilt minimizes wafer chatter
Single carrier capacity
Accommodates select 25-capacity carriers, excluding wide-flange carriers
Overall dimensions: 276×272×248 mm