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Air/N2 Gas Mass Flow Controllers with Metal bodies
Air/N2 Gas Mass Flow Controllers with Metal bodies
Certificates
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Air/N2 Gas Mass Flow Controllers with Metal bodies

Specifications

  • Leak integrity:
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • 1 X 10-7 sccs He (max)
  • Max. particulate size:
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • 5 µm
  • Min. operating temperature:
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • 0 °C (32 °F)
  • Width:
  • 4.75"
  • 4.75"
  • 4.75"
  • 4.75"
  • 4.75"
  • 4.75"
  • 4.75"
  • 4.75"
  • 4.75"
  • 4.75"
  • 4.75"
  • 5.25"
  • 5.25"
  • 5.25"
  • 4.75"
  • 5.25"
  • Certification:
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Yes
  • Response Time:
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • 2000 ms
  • Max. air flow rate:
  • 1000 ml/min
  • 2000 ml/min
  • 200 ml/min
  • 500 ml/min
  • 50 ml/min
  • 100 ml/min
  • 100000 ml/min
  • 1000000 ml/min
  • 15000 ml/min
  • 50000 ml/min
  • 5000 ml/min
  • Max. N₂ flow rate:
  • 1000 ml/min
  • 2000 ml/min
  • 200 ml/min
  • 500 ml/min
  • 50 ml/min
  • 100 ml/min
  • 100000 ml/min
  • 1000000 ml/min
  • 15000 ml/min
  • 50000 ml/min
  • 5000 ml/min
  • Min. air flow rate:
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • Min. N₂ flow rate:
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • Min. Flow Rate:
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • 0 ml/min
  • Max. Pressure:
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • 1000 psi
  • Max. Operating Temperature:
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • 50 °C (122 °F)
  • Pressure drop at max. flow:
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 1.06 psid
  • 10 psid
  • 47 psid
  • 3.87 psid
  • 8 psid
  • 1.06 psid
  • 8 psid
  • 47 psid
  • Repeatability:
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • ±0.5% full-scale
  • Accuracy:
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • ±1.5% full-scale
  • Output:
  • 0 to 5 VDC (1000 Ω minimum); linear 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • 0 to 5 VDC (1000 Ω minimum); linear 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • 0 to 5 VDC (1000 Ω minimum); linear 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • 0 to 5 VDC (1000 Ω minimum); linear 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • 0 to 5 VDC (1000 Ω minimum); linear 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • 0 to 5 VDC (1000 Ω minimum); linear 4 to 20 mA (50 to 500 Ω loop resistance)
  • Linear 0 to 5 VDC (1000 Ω minimum load), 4 to 20 mA (50 to 500 Ω loop resistance)
  • Wetted Materials:
  • Stainless Steel, Viton
  • Anodized Aluminum, Brass, Viton
  • Anodized Aluminum, Brass, Viton
  • Anodized Aluminum, Brass, Viton
  • Stainless Steel, Viton
  • Anodized Aluminum, Brass, Viton
  • Stainless Steel, Viton
  • Anodized Aluminum, Brass, Viton
  • Stainless Steel, Viton
  • Anodized Aluminum, Brass, Viton
  • Stainless Steel, Viton
  • Anodized Aluminum, Brass, Viton
  • Anodized Aluminum, Brass, Viton
  • Anodized Aluminum, Brass, Viton
  • Anodized Aluminum, Brass, Viton
  • Anodized Aluminum, Brass, Viton
  • Stainless Steel, Viton
  • Stainless Steel, Viton
  • Display Type:
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • 3.5-digit LCD. detachable
  • Communication Interface:
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • linear 0 to 5 VDC(1000 Ω minimum load), 4 to 20 mA(50 to 500 Ω loop resistance)
  • Process connection:
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 3/8" Compression
  • 3/4" NPT(F)
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/4" Compression
  • 1/2" Compression
  • Power:
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • 12 VDC, 1100 mA max
  • Height:
  • 5.625"
  • 5.625"
  • 5.625"
  • 5.625"
  • 5.625"
  • 5.625"
  • 5.625"
  • 5.625"
  • 5.625"
  • 5.625"
  • 5.625"
  • 6"
  • 6"
  • 6"
  • 5.625"
  • 6"
  • Warranty:
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year
  • 1 year

Specifications