Inline gas filters, Wafergard® II F Micro

Supplier: ENTEGRIS

Supplier: ENTEGRIS

About this item

Recommended for inert and reactive gases, these filters offer excellent compatibility with all classes of semiconductor process gases. Its compact diameter enables easy installation in cramped gas panels and cabinets.

Superior particulate filtration for ultrapure gas system filtration
Low pressure drop reduces the risk of condensation in low vapour pressure gases
Cleanroom manufactured, welded and tested
PTFE membranes provide high efficiency filtration

Filter element: hydrophobic PTFE membrane supported by moulded PTFE PFA structure; housing: electropolished VAR 316L stainless steel.

Applications: ozone applications (gas), gas cabinets, ultrapure gas systems, gas panels, inside process tools.

Downstream cleanliness particles: Less than 0,03 particles/liter (<1 particle/0,028 m³) greater than 0,01 μm.

Downstream cleanliness volatiles: <10 ppb moisture.

Specifications

Catalog No:
ENTEWG2FT1SS2
ENTEWGFG01RH2
ENTEWG2FT1RF2
ENTEWG2FT1RR2
ENTEWG2FT1BW2

Material:
PTFE
PTFE
PTFE
PTFE

Max. differential pressure:
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C
Forward: 4 bar at 23 °C
Reverse: 0,7 bar at 23 °C

Max. operating pressure:
207 bar @ 23 °C
207 bar @ 23 °C
207 bar @ 23 °C
207 bar @ 23 °C

Leak rating:
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec
Qualified: 2 x 10^-10 atm-cc/sec
Tested: 1 x 10^-9 atm-cc/sec

Max. operating temperature:
120 °C
120 °C
120 °C
120 °C

Fitting size:
1/4" Swagelok® seal
1/4" gasket seal
1/4" gasket seal
1/4"

Inlet/outlet:
Male/male
Male/female
Male/male
Buttweld

Ø×L:
19×74 mm
19×89 mm
19×84 mm
19×90 mm

Specifications

Frequently Bought Together

Acetone ≥99%, TECHNICAL

Supplier: VWR Chemicals

Sealing film for manual application, Parafilm® M

Supplier: HEATHROW

Nitrile gloves, Kimtech™ Purple Nitrile™

Supplier: KIMBERLY CLARK

VWR® Serological Pipette, Standard Line

Supplier: VWR Collection

Sodium hydroxide 0.1 mol/l (0.1 N) in aqueous solution, AVS TITRINORM Reag. Ph. Eur. volumetric solution

Supplier: VWR Chemicals

Methanol ≥99.8%, HiPerSolv CHROMANORM® Reag. Ph. Eur., gradient grade for HPLC

Supplier: VWR Chemicals

Water, HiPerSolv CHROMANORM® for HPLC

Supplier: VWR Chemicals

Acetonitrile ≥99.9%, LiChrosolv® Reag. Ph. Eur., gradient grade for liquid chromatography, Supelco®

Supplier: Merck

VWR®, Nitrile Gloves

Supplier: VWR Collection

VWR® Facial Tissues

Supplier: VWR Collection

pH indicator strips, MQuant®, Supelco®

Supplier: Merck

Acetonitrile ≥99.9%, HiPerSolv CHROMANORM® for LC-MS, suitable for UPLC/UHPLC instruments

Supplier: VWR Chemicals

VWR® NITRILE LIGHT, Nitrile Gloves

Supplier: VWR Collection

VWR®, Transfer Pipettes, High Performance

Supplier: VWR Collection

Acetonitrile, anhydrous (max. 0.003% H₂O) ≥99.95%, HiPerSolv CHROMANORM® Reag. Ph. Eur., Reag. USP, ACS, super gradient grade suitable for UPLC/UHPLC instruments

Supplier: VWR Chemicals