182 Series
The industry standard 150 mm process wafer carrier. Four-point contact on the 'H' bar for improved wafer positioning. Open sidewall design to minimise liquid traps and promote even solution coverage and drainage. High profile design for maximum wafer protection.
'H' bar equipment interface
Pins and holes on the top rail
Chemical resistant natural PFA material
Wafer capacity: 25
D1 dimension: 14,5 mm
Pocket spacing: 4,8 mm
Pocket flat: 1,5 mm
190 Series
Low profile for optimum performance in centrifugal applications. Low contour for improved spray penetration to the wafers. Open sidewall design to minimize liquid traps and promote even solution coverage and drainage.
'H' bar equipment interface
Pins and holes on the top rail
Chemical resistant natural PFA material
Wafer capacity: 25
D1 dimension: 14,5 mm
Pocket spacing: 4,8 mm
Pocket flat: 1,4 mm
194 Series
Superior process carrier automation performance. Improved process carrier rigidity and dimensional stability. Four-point contact on the 'H' bar and track for improved wafer positioning. Open sidewall design to minimize liquid traps and promote even solution coverage and drainage. High profile design for maximum wafer protection.
Locating track notches for the center of the thirteenth pocket.
'H' bar equipment interface
Pins and holes on the top rail
Chemical resistant natural PFA material
Wafer capacity: 25
D1 dimension: 14,5 mm
Pocket spacing: 4,8 mm
Pocket flat: 1,5 mm