Ergonomically correct, disposable, and reusable scrubbing handles and pads for cleaning critical surfaces on process equipment in the semiconductor, flat-panel display, optical component, and hard disk drive industries.

Pads contain diamond or silicon carbide grit. Silicon carbide pads are backed with a pressure-sensitive adhesive for use with the disposable handles. Diamond pads are backed with either a pressure-sensitive adhesive for attachment to the disposable handles or hook and loop fasteners for easy replacement on the reusable handles.

• Pads contain diamond or silicon carbide grit
• Hard handle scrubber is for use on flat surfaces such as Novellus™ heat blocks

Ergonomically correct, disposable, and reusable scrubbing handles and pads for cleaning critical surfaces on process equipment in the semiconductor, flat-panel display, optical component, and hard disk drive industries.

Silicon carbide pads are backed with a pressure-sensitive adhesive for use with the disposable handles. Diamond pads are backed with either a pressure-sensitive adhesive for attachment to the disposable handles or hook and loop fasteners for easy replacement on the reusable handles.

Soft handle scrubber may be used to clean implant tools, large vacuum chambers, ceramic domes, and other spherical surfaces.